Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5423399 | Surface Science | 2012 | 5 Pages |
Abstract
⺠The incorporation of nitrogen on Al2O3 surfaces is theoretically investigated. ⺠The O atoms of Al2O3 surfaces can be replaced by N atoms under pregrowth conditions. ⺠The outermost O atoms tend to desorb from the surface. ⺠AlN layers are consequently formed on Al2O3 surfaces. ⺠The calculated N-incorporated structures agree with those in the experiments.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Toru Akiyama, Yasutaka Saito, Kohji Nakamura, Tomonori Ito,