Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5423943 | Surface Science | 2009 | 7 Pages |
Abstract
We report on the adsorption of nitrogen on the Cu(1 0 0) surface when using a radio-frequency plasma source to obtain atomic nitrogen. In these conditions, more than 0.5 ML of nitrogen can be adsorbed, due to N being implanted in both the surface and subsurface layers. The N adsorption modifies drastically the Cu surface, with the formation of a number of small irregular islands and dislocations. A copper nitride Cu3N thin film with a (1 0 0) texture can be grown by codepositing Cu and N at â¼100 °C.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
David Ãcija, José M. Gallego, Rodolfo Miranda,