Article ID Journal Published Year Pages File Type
5426741 Surface Science 2006 4 Pages PDF
Abstract

The transformation of Co/Si to CoSi2/Si in the temperature range of 300-1170 K has been investigated using depth-resolved positron annihilation and Glancing incidence X-ray diffraction (GIXRD). The different silicide phases formed are identified from the experimental positron annihilation characteristics, which are consistent with the GIXRD results. The present study clearly indicates the absence of vacancy defects in the silicide overlayer.

Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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