High resolution EUV spectroscopy of xenon ions with a compact electron beam ion trap

•We recorded high resolution EUV spectra of xenon with a compact EBIT.•Measured wavelengths with improved uncertainty.•Observed three new lines that were reported as unidentified lines in the literature.•Compared observed spectra with the previous results and found in good agreement.

We performed high resolution extreme ultraviolet (EUV) spectroscopy measurements of highly charged xenon ions with a compact electron beam ion trap. The spectra were recorded with a flat-field grazing incidence spectrometer while varying the electron beam energy between 200 and 890 eV. We measured the wavelengths for several lines of Rh-like Xe9+ - Cd-like Xe6+ and Cu-like Xe25+- Se-like Xe20+ in the range of 150-200 Å with an uncertainty of 0.05 Å. Previously, most of these lines have been reported from EBITs with a wavelength uncertainty of 0.2 Å. Additionally, based on the electron beam energy dependence of the observed spectra we tentatively identified three new lines, which were reported as unidentified lines in the previous studies.