Term structure of 4d-electron configurations and calculated spectrum in Sn-isonuclear sequence

Theoretical calculations of term structure are carried out for the ground configurations 4dw, of atomic ions in the Sn isonuclear sequence. Atomic computations are performed to give a detailed account of the transitions in Sn+6 to Sn+13 ions. The spectrum is calculated for the most important excited configurations 4p5 4dn+1, 4dn−1 4f1, and 4dn−1 5p1 with respect to the ground configuration 4dn, with n=8-1, respectively. The importance of 4p-4d, 4d-4f, and 4d-5p transitions is stressed, as well as the need for the configuration-interaction CI treatment of the Δn=0 transitions. In the region of importance for extreme ultraviolet (EUV) lithography around 13.4 nm, the strongest lines were expected to be 4dn-4p5 4dn+1 and 4dn-4dn−1 4f1.