Position-selective metal oxide nano-structures using graphene catalyst for gas sensors

The thermal transport growth of various metal oxide (MOx) nanostructures using graphene as a catalytic layer was studied. Graphene was synthesized by Cu-catalyzed chemical vapor deposition and transferred onto a SiO2-covered Si substrate using bubble transfer methods. Due to the catalytic activity of the atomic-thick carbon layer, control of the position of the MOx nanostructures as well as the growth parameters, such as nucleation density and growth rate, could be achieved. The position-selective and density-controlled MOx nanostructures were evaluated for hydrogen gas sensor applications, where different responses were obtained with hydrogen molecules.

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