Cross-correlation based high resolution electron backscatter diffraction and electron channelling contrast imaging for strain mapping and dislocation distributions in InAlN thin films

Article ID	Journal	Published Year	Pages	File Type
5436547	Acta Materialia	2017	11 Pages	PDF

Keywords

EBSD eCCI HEMTs InAlN dislocations

Related Topics

Physical Sciences and Engineering Materials Science Ceramics and Composites

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$Cross-correlation based high resolution electron backscatter diffraction and electron channelling contrast imaging for strain mapping and dislocation distributions in InAlN thin films$

Authors

A. Vilalta-Clemente, G. Naresh-Kumar, M. Nouf-Allehiani, P. Gamarra, M.A. di Forte-Poisson, C. Trager-Cowan, A.J. Wilkinson,