Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5438932 | Ceramics International | 2017 | 10 Pages |
Abstract
In this study, we systematically investigated the effects of negative bias voltage on the composition, deposition efficiency, microstructure, and mechanical properties of multi-arc ion plated (MAIP) AlTiN films. The films were deposited on high-speed steel substrates by MAIP at various negative bias voltages. The results indicated that the Al content [Al/(Al+Ti) ratio] and the deposition efficiency were significantly altered by the application of negative bias voltages. X-ray photoelectron spectroscopy analysis showed that the AlTiN films were composed of Ti-N and Al-N bonds. The macroparticles (MPs) on the film surface decreased with increasing negative bias voltage. We also discussed the different types of MPs found on the films and their influence on the process of determining the hardness of the films. The microhardness of the films depends on the negative bias voltages. The films deposited at â250Â V exhibited a maximum hardness of ~45Â GPa. The adhesion and frictional tests revealed that the film deposited at â150Â V demonstrated the highest cracking resistance, the best adhesion under a critical load of 78 N, highest adhesion strength, and the lowest and stablest coefficient of friction at 0.23.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Fei Cai, Mohan Chen, Mingxi Li, Shihong Zhang,