Article ID Journal Published Year Pages File Type
5440641 Journal of the European Ceramic Society 2017 11 Pages PDF
Abstract
TaC coatings were deposited on graphite substrates via wet powder forming and sintering to potentially achieve both a highly reliable and low-cost process. Non-aqueous solvent mixtures of TaC slurries were optimized through characterization of raw materials and a novel design guide based on Hansen solubility parameters. The optimized TaC slurries enabled the formation of high-quality TaC powder compact films with ultrahigh powder packing densities of ≥70% (ca. 85% at maximum), which contributed to prevent defect formation in the TaC coatings after sintering. The TaC-coated components were tested in practical high-temperature processes, such as AlN and SiC bulk single crystal growth processes, and a SiC device fabrication process, which confirmed sufficiently low-levels of impurity incorporation and surface contamination from the TaC layers. The novel TaC-coated graphite components will contribute to higher quality and lower cost for bulk crystal growth, device fabrication, and epitaxial film growth processes of group-III nitrides and SiC.
Related Topics
Physical Sciences and Engineering Materials Science Ceramics and Composites
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