| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5444028 | Solid State Sciences | 2016 | 5 Pages |
Abstract
Aqueous-processed aluminum oxide phosphate (AlPO) dielectric films were studied to determine how water desorbs and absorbs on heating and cooling, respectively. In-situ Fourier transform infrared spectroscopy showed a distinct, reversible mono- to bidentate phosphate structural change associated with water loss and uptake. Temperature programmed desorption measurements on a 1-μm thick AlPO film revealed water sorption was inhibited by an aqueous-processed HfO2 capping film only 11-nm thick. The HfO2 capping film prevents water resorption, thereby preserving the exceptional performance of AlPO as a thin-film dielectric.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Cory K. Perkins, Ryan H. Mansergh, Deok-Hie Park, Charith E. Nanayakkara, Juan C. Ramos, Shawn R. Decker, Yu Huang, Yves J. Chabal, Douglas A. Keszler,