Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5444579 | Energy Procedia | 2017 | 8 Pages |
Abstract
This paper focuses on the implementation of partially new, alternative, cost effective and production-feasible process steps as ozone-based cleaning, inline PECVD and screen printing in the Silicon Heterojunction process chain enabling efficiencies up to 22.7%.
Keywords
Related Topics
Physical Sciences and Engineering
Energy
Energy (General)
Authors
Anamaria Moldovan, Andreas Fischer, Jan Temmler, Martin Bivour, Tobias Dannenberg, Denis Erath, Andreas Lorenz, Detlef Sontag, Jun Zhao, Arne Wissen, Florian Clement, Martin Zimmer, Jochen Rentsch,