A Unified Parameterization of the Formation of Boron Oxygen Defects and their Electrical Activity

Based on the experimental results and literature data we have created a parameterization of the lifetime limitation in silicon due to BO defects. Established findings from literature for uncompensated p-type silicon are taken into account and ensure general validity. The parameterization is useful to discuss BO defect influences and can serve to predict material properties after LID.