Low Temperature Thermal Treatments for n-type Emitters on Si Solar Cells

Here we report on the impact of annealing and oxidation processes for silicon solar cells performed at low temperatures, in terms of how recombination properties at the surface and within the emitter are modified. Results from this experiment show that bulk gettering of interstitial iron impurities is also enhanced from these thermal treatments. The addition of the low temperature processes also improves the internal quantum efficiency at the short wavelengths.