Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5447379 | Journal of Physics and Chemistry of Solids | 2017 | 5 Pages |
Abstract
A composite surfactants-assisted mix-solvothermal route has been presented to synthesize quasi-monodisperse silicon carbide (β-SiC) nanospheres in hexane and water mixed solvent at 180 °C. By changing hexane/water ratio, the size of β-SiC nanospheres can be effectively adjusted. Benefit from the spherical shapes and nearly uniform sizes, quasi-monodisperse β-SiC nanospheres exhibit excellent planarization ability and material removal rate. Take silicon wafers polishing as an example, compared with irregular β-SiC nanoparticles, quasi-monodisperse β-SiC nanospheres decrease the surface roughness by 50-74% and increase the removal rate by 17-30%.
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Authors
Meng Zhang,