Article ID Journal Published Year Pages File Type
5448940 Optics Communications 2018 5 Pages PDF
Abstract
The main function of the curved superlens is to magnify or minify the image of the pattern cut onto the mask in a photolithograph device. It is found theoretically, in this paper, that the magnifying or minifying function deals with two important properties: one is the magnifying (or minifying) effect and the other is the image quality. The magnifying (or minifying) effect of a specific superlens device can be expressed by a linear function and the image quality can be guaranteed by a quadratic function. The ways to obtain the two functions have been demonstrated in this paper.
Related Topics
Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials
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