Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5448940 | Optics Communications | 2018 | 5 Pages |
Abstract
The main function of the curved superlens is to magnify or minify the image of the pattern cut onto the mask in a photolithograph device. It is found theoretically, in this paper, that the magnifying or minifying function deals with two important properties: one is the magnifying (or minifying) effect and the other is the image quality. The magnifying (or minifying) effect of a specific superlens device can be expressed by a linear function and the image quality can be guaranteed by a quadratic function. The ways to obtain the two functions have been demonstrated in this paper.
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
Chen Zhao, Yun-Song Zhou, Qi Gao, Yan Zhang,