The design of a small flow optical sensor of particle counter

Based on the principle of Mie scattering, we design a small flow optical sensor of particle counter. Firstly, laser illumination system was simulated and designed by ZEMAX optical design software, and the uniform light intensity of photosensitive area was obtained. The gas circuit structure was also designed according to the related theory of fluid mechanics. Then, the method of combining with MIST scattering calculation software and geometric modeling was firstly used to design spherical reflection system, on the basis of the formula of object-image distance. Finally, the test was conducted after the optical sensor placed in self-designed pre-amplification and high-speed processing circuit. The test results show that the counting efficiency of 0.3μm gear is above 70%, 0.5μm gear and 1.0μm gear are both reached more than 90%, and the dispersion coefficient of each gear is very nearly the same, compared with the standard machine of Kanomax 3886 under the particle spraying flow of 2.5SCFH, 3.0SCFH, 3.5SCFH.