Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5456922 | Micron | 2017 | 34 Pages |
Abstract
Detailed simulations are necessary to correctly interpret the charge polarity of electron beam irradiated thin film patch. Relying on systematic simulations we provide guidelines and movies to interpret experimentally the polarity of the charged area, to be understood as the sign of the electrostatic potential developed under the beam with reference to a ground electrode. We discuss the two methods most frequently used to assess charge polarity: Fresnel imaging of the irradiated area and Thon rings analysis. We also briefly discuss parameter optimization for hole free phase plate (HFPP) imaging. Our results are particularly relevant to understanding contrast of hole-free phase plate imaging and Berriman effect.
Related Topics
Physical Sciences and Engineering
Materials Science
Materials Science (General)
Authors
Marek Malac, Simon Hettler, Misa Hayashida, Masahiro Kawasaki, Yuji Konyuba, Yoshi Okura, Hirofumi Iijima, Isamu Ishikawa, Marco Beleggia,