Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5457052 | Micron | 2016 | 106 Pages |
Abstract
We present a review of the recent progress in electron tomography applicable to materials science samples. We focus on practical high accuracy tomographic measurements and their applications. We follow the steps leading to a reconstructed 3D volume and discuss the effect of the individual steps on the suitability of the resulting 3D volume for quantitative measurements. Both the progress in applications and new opportunities in electron tomography in materials science are reviewed.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Materials Science (General)
Authors
Misa Hayashida, Marek Malac,