Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5458216 | Journal of Alloys and Compounds | 2017 | 5 Pages |
Abstract
High quality single crystalline Nb-doped anatase phase TiO2 films with different Nb concentrations were deposited on LSAT (100) substrates by metal organic chemical vapor deposition (MOCVD) at 600 °C. The influences of Nb concentration on the structural, electrical and optical properties of the films have been investigated. The obtained films were single crystalline anatase TiO2 and the epitaxial relationship between the films and the substrates was confirmed as TiO2 (001) || LSAT (100) with TiO2 [010] || LSAT [010]. The resistivity of the films was reduced by almost 8 orders of magnitude after Nb doping and a minimum resistivity of 4.0 Ã 10â2Ωâ
cm was obtained in 0.6% Nb-doped samples. The films achieved a maximum mobility as high as 13.5Â cm2â
Vâ1â
sâ1. The carrier concentration was in a range of 9.4Â ÃÂ 1017-1.7Â ÃÂ 1019Â cmâ3. The optical transmittance of the films in the visible range exceeded 93% and the optical band gap was varied from 3.48 to 3.53Â eV.
Related Topics
Physical Sciences and Engineering
Materials Science
Metals and Alloys
Authors
Weiguang Wang, Xianjin Feng, Xiaochen Ma, Linan He, Qiong Cao, Jin Ma,