| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5460637 | Journal of Alloys and Compounds | 2017 | 6 Pages |
Abstract
The surface morphology of AlN epilayers strongly depend on the initial â
¤/â
¢ ratios, root-mean square (RMS) roughness value of the surface is decreased with the initial â
¤/â
¢ ratios.450
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Metals and Alloys
Authors
Weike Luo, Liang Li, Zhonghui Li, Qiankun Yang, Dongguo Zhang, Xun Dong, Daqing Peng, Lei Pan, Chuanhao Li, Bin Liu, Rong Zhong,