| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5460790 | Journal of Alloys and Compounds | 2017 | 5 Pages |
Abstract
Nitrogen doped indium oxide (InON) and indium tin oxide (ITON) thin films were fabricated with reactive sputtering in nitrogen-rich plasmas for high temperature thermocouples. Different annealing processes were applied to improve the performance of indium oxide-based thin film thermocouples. The microstructural changes in the films were revealed by X-ray photoelectron spectroscopy (XPS). Metastably retained nitrogen in as-deposited film was transformed into In2O3 and/or oxynitrides after annealing. And significant improvement of linearity and high temperature stability was achieved in N2-Air annealed ITO thin-film thermocouples.
Related Topics
Physical Sciences and Engineering
Materials Science
Metals and Alloys
Authors
Xiaohui Zhao, Haitao Li, Ke Yang, Shuwen Jiang, Hongchuan Jiang, Wanli Zhang,