Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5464645 | Surface and Coatings Technology | 2017 | 27 Pages |
Abstract
Titanium morphology does not change with power or pressure. The deposition rate is lower than predicted by the differences in sputtering yields at 68 nm hâ 1 for a pressure of 6 Pa.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Daniel A.L. Loch, Arutiun P. Ehiasarian,