Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5464773 | Surface and Coatings Technology | 2017 | 8 Pages |
Abstract
This review presents a short and comprehensive view of the current state of the art of FLA with a focus on functional coatings. After an introduction including historical aspects a look is taken to equipment issues as well as to the pioneering role which semiconductor processing in the framework of advanced chip technology played for the development of short time annealing. Mostly, examples of processing for photovoltaics, including doping aspects, hydrogen engineering, copper indium gallium diselenide (CIGS), silicon crystallization on glass, and transparent conductive oxides (TCO), including indium tin oxide (ITO), zinc oxide (also Al-doped AZO) as well as inkjet printing for flexible electronics will be presented.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Wolfgang Skorupa, Thomas Schumann, Lars Rebohle,