Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5464784 | Surface and Coatings Technology | 2017 | 6 Pages |
Abstract
We describe a new method for the deposition of protective ceramic-based coatings. The novelty of the method lies in the unique interaction of the electron beam with a dielectric target, in which ions in the beam-produced plasma neutralize the target surface charge build-up. This effect is brought about by the use of our novel forevacuum-pressure, plasma-cathode electron beam source, which can produce energetic, focused electron beams, with associated beam-produced plasmas, in the previously inaccessible pressure range of 1-100Â Pa. The work described here demonstrates the evaporation of aluminum oxide ceramic by electron beam bombardment and the subsequent deposition of an alumina coating. A significant increase in the microhardness of the ceramic-coated Ti substrate and a uniform depth-distribution of the elemental composition has been determined. The approach described here opens up new opportunities for the deposition of coatings in various fields of industry.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
E.M. Oks, A.V. Tyunkov, Yu.G. Yushkov, D.B. Zolotukhin,