| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5465067 | Surface and Coatings Technology | 2017 | 10 Pages |
Abstract
The combination of calculations and experiments have made it possible to reveal the structure of energy and particles fluxes towards the substrate during the operation of the magnetron sputtering system with a liquid-phase target. The contribution of these fluxes formed by different mechanisms in a wide range of magnetron power has also been found out. The analysis of structural and mechanical properties of copper films being deposited at different energy and particles fluxes ratio towards the substrate has been carried out. It has been found that at intensive evaporation the coating surface is smooth and uniform, and the size of grains decreases. The mechanical properties of coatings (adhesion and microhardness) have got higher values compared to the cases related to only sputtering.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
G.A. Bleykher, A.O. Borduleva, A.V. Yuryeva, V.P. Krivobokov, J. LanÄok, J. BulÃÅ, J. Drahokoupil, L. KlimÅ¡a, J. KopeÄek, L. Fekete, R. Ätvrtlìk, J. TomaÅ¡tik,