Article ID Journal Published Year Pages File Type
5466138 Thin Solid Films 2017 20 Pages PDF
Abstract
The microstructural and optical properties of examined oxides are directly associated with specific growth conditions (the impulse injection of the reactive gas) in the pulse gas injection magnetron sputtering process carried out in the low pressure oxygen plasma.
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Physical Sciences and Engineering Materials Science Nanotechnology
Preview
Optical and microstructural characterization of amorphous-like Al2O3, SnO2 and TiO2 thin layers deposited using a pulse gas injection magnetron sputtering technique
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