Adhesion behavior of diamond-like carbon films with F and Si co-doping prepared by radio frequency reactive magnetron sputtering

Diamond-like carbon (DLC) films with F and Si co-doping (DLC:F:Si films) were deposited on medical 316 L stainless steel substrates with radio frequency reactive magnetron sputtering by using trifluromethane (CHF3) and argon as source gases and SiC crystal target. The relations between the RF input powers and adhesion behavior of DLC:F:Si films were investigated. Surface morphology and roughness, hardness, sp2/sp3 hybridization ratio, and bonding configuration were characterized subsequently to demonstrate the adhesion evolution by Atomic force microscope (AFM), nanoindenter, Raman spectrometer, Fourier-transform infrared (FTIR) spectrometer and Friction and wear tester. The relative intensity of the CF symmetric stretch vibration (1160 cm− 1) to CF2 asymmetric stretch vibration (1220 cm− 1) and HFCC < stretch vibration (1620 cm− 1) to F2CC < stretch vibration (1710 cm− 1) as a function of RF input powers were especially demonstrated. The results show that choosing a appropriate RF input power can effectively modulate the structure and adhesion characteristics of DLC:F:Si films. The DLC:F:Si films prepared at about 200 W RF input power have stable bond configuration and exhibit good adherence, hardness and wear resistance.