| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5466540 | Thin Solid Films | 2016 | 4 Pages |
Abstract
The IGZO thin films were also tested for use as gas sensors. When attached by ozone molecules, the resistance of the film altered as a result of electron transfer from the film to the gas molecules. The fabricated IGZO films can detect ozone to the ppb level. Our results showed that IGZO thin films were capable of sensing both ozone gas and UV light with high sensitivity.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Chin-Wei Lin, Kuang-Lu Huang, Kai-Wei Chang, Jan-Han Chen, Kuen-Lin Chen, Chiu-Hsien Wu,