Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5467009 | CIRP Annals - Manufacturing Technology | 2017 | 4 Pages |
Abstract
Quadrant glitches commonly occur when rolling/sliding bearings are used in precision motion stages. Compensating them accurately using feedforward control is challenging due to the need for complex friction models, and the variability of on-machine friction dynamics. This paper shows that quadrant glitches can be accurately and robustly compensated with simple friction models by attaching the bearing to the moving table using a joint that is very compliant in the motion direction. Design of a prototype joint that achieves high compliance by combining a positive-stiffness flexure with negative-stiffness permanent magnets is presented. Large reductions in quadrant glitches are demonstrated in experiments.
Keywords
Related Topics
Physical Sciences and Engineering
Engineering
Industrial and Manufacturing Engineering
Authors
Xin Dong, Xingjian Liu, Deokkyun Yoon, Chinedum E. Okwudire,