| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5467116 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2017 | 8 Pages |
Abstract
This paper presents results of experimental investigation of combined impact of 500Â keV protons with fluences of 1015-1016Â cmâ2 and oxygen plasma with fluences of (0.8-3.5)Â 1020Â cmâ2 on polyimide films. Measured UV-vis transmission, Raman and XPS spectra of polyimide specimens before and after combined impact and data on the sample mass losses as a result of erosion due to oxygen plasma exposure are given. On the base of the obtained spectroscopic results, the changes in the polyimide structure caused by the proton and oxygen irradiation are analyzed and discussed.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
L.S. Novikov, E.N. Voronina, V.N. Chernik, L.A. Zhilyakov, N.P. Chirskaya,