| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5467144 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2017 | 7 Pages |
Abstract
Surface exfoliation was observed on single crystal silicon surface irradiated by Intense Pulsed Ion Beam (IPIB). As the strong transient thermal stress impact induced by IPIB was mainly attributed to the exfoliation, a micro scale model combined with thermal conduction and linear elastic fracture mechanics was built to analyze the thermal stress distribution along the energy deposition process. After computation with finite element method, J integral parameter was applied as the criterion for crack development. It was demonstrated that the exfoliation initiation calls for specific material, crack depth and IPIB parameter. The results are potentially valuable for beam/target selection and IPIB parameter optimization.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Jie Shen, Ijaz Shahid, Xiao Yu, Jie Zhang, Haowen Zhong, Xiaojun Cui, Guoying Liang, Xiang Yu, Wanying Huang, Sha Yan, Gaolong Zhang, Xiaofu Zhang, Xiaoyun Le,