Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5467156 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2017 | 8 Pages |
Abstract
The CHIMP beamline has been tested with the 3 MeV H+ and 6 MeV He2+ ion beams. The settings of the object and collimating apertures have been optimized using the WinTRAX simulation code for calculation of the optimum acceptance settings in order to obtain the highest possible ion current for beam spot sizes of 1 μm and 5 μm. For optimized aperture settings of the CHIMP the beam brightness was measured to be â¼0.9 pA μmâ2 mradâ2 for 3 MeV H+ ions, while the brightness of â¼0.4 pA μmâ2 mradâ2 was measured for 6 MeV He2+ ions. The smallest beam sizes were achieved using a microbeam with reduced particle rate of 1000 Hz passing through the object slit apertures several micrometers wide. Under these conditions a spatial resolution of â¼0.6 μm Ã 1.5 μm for 3 MeV H+ and â¼1.8 μm Ã 1.8 μm for 6 MeV He2+ microbeams in horizontal (and vertical) dimension has been achieved. The beam sizes were verified using STIM imaging on 2000 and 1000 mesh Cu electron microscope grids.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Z. Pastuovic, R. Siegele, D.D. Cohen, M. Mann, M. Ionescu, D. Button, S. Long,