Article ID Journal Published Year Pages File Type
5467159 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2017 8 Pages PDF
Abstract
An electrostatic quadrupole doublet lens system has been designed and constructed to provide strong, mass-independent focusing of 1-3 MeV ions to a 1 µm2 spot size. The electrostatic doublet consists of four sets of gold electrodes deposited on quartz rods that are positioned in a precision machined rigid frame. The 38 mm electrodes are fixed in a quadrupole doublet arrangement having a bore diameter of 6.35 mm. The coating process allows uniform, 360° coverage with minimal edge defects. Determined via optical interferometry, typical surface roughness is 6 nm peak to valley. Radial and coaxial alignment of the electrodes within the frame is accomplished by using a combination of rigid and adjustable mechanical supports. Axial alignment along the ion beam is accomplished via external manipulators. COMSOL Multiphysics® v5.2 and Propagate Rays and Aberrations by Matrices (PRAM) were used to simulate ion trajectories through the system.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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