Structure of Cu-N layers synthesized by pulsed magnetron sputtering with variable frequency of plasma generation

Reported studies focus on the structure of the Cu-N layers. The results showed that the synthesis processes strongly depend of sputtering parameters. The modulation of sputtering frequency had an effect on the structure, phase composition and consequently, the properties of synthesized layers. Our results revealed that the studied parameter should be considered as an another important factor for optimization of layers synthesis and opens new paradigm in future implementation of PMS-based methods.