Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5467302 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2017 | 51 Pages |
Abstract
These results led us to propose several instrumental improvements including the crucial interest of an additional octopole upstream in the primary ion probe column to prevent scanning distortion when performing astigmatism correction and the possibility of offsetting primary beam deviating plates to bring scanning and imaging centers in coincidence.
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Authors
Georges Slodzian, Ting-Di Wu, Jean Duprat, Cécile Engrand, Jean-Luc Guerquin-Kern,