Article ID Journal Published Year Pages File Type
5467302 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2017 51 Pages PDF
Abstract
These results led us to propose several instrumental improvements including the crucial interest of an additional octopole upstream in the primary ion probe column to prevent scanning distortion when performing astigmatism correction and the possibility of offsetting primary beam deviating plates to bring scanning and imaging centers in coincidence.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Authors
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