| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5467412 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2017 | 7 Pages |
Abstract
The analytical differential cross section (DCS) of elastic scattering of atoms that reproduces the stopping power and the straggling of energy loss is proposed. Analytical expressions derived from the DCS for diffusion Ïd and viscosity Ïv cross sections of elastic collisions of atoms are in good agreement with known cross sections of 38Ar-40Ar and H-Li collisions obtained from quantum mechanical simulations. The Monte Carlo modeling of the transport of sputtered Cu atoms in Ar and implantation of Bi ions in B and C materials made using the proposed DCS demonstrates its accuracy in the modeling of elastic collisions.
Keywords
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Surfaces, Coatings and Films
Authors
E.G. Sheikin,