| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5467424 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2017 | 5 Pages |
Abstract
We describe the ion beam analysis activities at imec. Rutherford backscattering spectrometry and time of flight-energy (TOF-E) elastic recoil detection analysis are pursued to support the nano-electronics research and development. We outline the experimental set-up and we introduce a new data acquisition software platform. Finally, we illustrate the use of Rutherford backscattering spectrometry to map the thickness of a metallic thin film on a 300Â mm Si wafer.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
J. Meersschaut, W. Vandervorst,