Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5467433 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2017 | 5 Pages |
Abstract
A time of flight-energy (TOF-E) telescope is often used to detect the scattered and recoiled atoms in elastic recoil detection analysis. The experimental two-dimensional TOF-E histogram may be numerically transformed into a time of flight-mass (TOF-M) histogram. The limited mass resolution in the TOF-M histogram, which results from the limited energy resolution of the energy detector, makes it sometimes difficult to discriminate elements with a small difference in atomic mass. We describe a mass discrimination procedure to numerically discriminate the elements in the TOF-M histogram. The procedure is illustrated on a sample consisting of an Al and a Si layer deposited on a MgO substrate. Besides, we apply the procedure to discriminate Al and Si in a sample consisting of Al2O3 deposited on MoS2/SiO2/Si.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
G. Laricchiuta, W. Vandervorst, J. Meersschaut,