| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5467569 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2017 | 5 Pages |
Abstract
The results of molecular dynamics simulations of the bombardment of the Cu (100) and Mo (100) single-crystals by 10Â keV Ar cluster ions of different sizes are presented in this paper. Spatial distributions of sputtered material were calculated. The anisotropy of the angular distributions of sputtered atoms was revealed. It was found that the character of the anisotropy is different for Cu and Mo targets. The reasons leading to this anisotropy are discussed according to the dependences of the angular distributions on the cluster size and on the target material.
Keywords
Related Topics
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Materials Science
Surfaces, Coatings and Films
Authors
A.V. Nazarov, V.S. Chernysh, K. Nordlund, F. Djurabekova, J. Zhao,