Total electron scattering cross sections of molecules containing H, C, N, O and F in the energy range 0.2-6.0Â keV

Based on the effective atomic total electron scattering cross sections (EATCS) of atoms in a molecular environment, a simple model is proposed to predict the total electron scattering cross sections (TCS) of H, C, N, O, and F containing molecules. The EATCS for these five atoms are reported for 0.2-6.0 keV energies. The predicted TCS by this model are compared with experimental TCS in the literature. The experimental TCS of CHF3, C2F4, C2F2H2, C4F6, and c-C4F8 have been obtained for 0.2-4.5 keV electrons by measuring the attenuation of the electron beam through a gas cell.