Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5468009 | Vacuum | 2017 | 19 Pages |
Abstract
W-Nb-N coatings with Nb content ranging from 0 to 13.2 at.% were deposited by reactive magnetron sputtering technique. The influence of Nb content on the structure and mechanical properties was investigated. The results show that Nb atoms substitute W atoms forming the solid solution W-Nb-N. All the coatings exhibit a single-phase face-centered cubic (fcc) structure and the preferred orientation changes from (200) to (111) with Nb addition. The grain size of W-Nb-N coatings decreases with the increase of Nb content. The hardness and elastic modulus of W-Nb-N coatings increase gradually from 28.0 GPa to 320 GPa at 0 at.% Nb to 36.0 GPa and 386 GP at 13.2 at.% Nb, respectively. The adhesion between coatings and Si substrate also could be improved by Nb addition.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Fuxing Ye, Hongjian Zhao, Xiubo Tian,