Article ID Journal Published Year Pages File Type
5468046 Vacuum 2017 4 Pages PDF
Abstract

- Numerical approach addressing the pump down of reversibly adsorbed phase (e.g. water) in complex vacuum system.
- Mathematical model based on the view factor (or angular coefficients) methods coupled with the Langmuir adsorption desorption kinetic model.
- Model tested on a spherical vacuum system and results are compared to the ones obtained with the well-known Redhead model.
- Model applied to a more complex vacuum system in order to appreciate the effect of pressure inhomogeneity.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Authors
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