Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5468046 | Vacuum | 2017 | 4 Pages |
Abstract
- Numerical approach addressing the pump down of reversibly adsorbed phase (e.g. water) in complex vacuum system.
- Mathematical model based on the view factor (or angular coefficients) methods coupled with the Langmuir adsorption desorption kinetic model.
- Model tested on a spherical vacuum system and results are compared to the ones obtained with the well-known Redhead model.
- Model applied to a more complex vacuum system in order to appreciate the effect of pressure inhomogeneity.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
M.F. Urbano, P. Manini,