Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5468124 | Vacuum | 2017 | 23 Pages |
Abstract
To minimize the impact on the machine downtime due to replacement of a TPS bending chamber, an on-site cutting method had been developed. This method can shorten the replacement time of a bending chamber from 50 to 4 days and avoid breaking the vacuum in the frond ends and adjacent insertion devices. We also developed a plug to prevent micro dust, generated from saw-cutting of the vacuum chamber, contaminating the beam duct. Three different preconditioning methods, including baking, prebaking and no-bake treatments, were applied to the newly installed arc-cell vacuum systems to evaluate their efficacy on reducing the photon stimulated desorption (PSD) in the vacuum chambers. The PSD data show no obvious discrepancy between these preconditioning methods.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
C.K. Chan, C.C. Chang, C. Shueh, I.C. Yang, L.H. Wu, C.M. Cheng, Y.T. Huang, J.Y. Chuang, Y.T. Cheng, Y.M. Hsiao, B.Y. Chen, Albert Sheng,