Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5468209 | Vacuum | 2017 | 5 Pages |
Abstract
The effect of target power density, substrate bias potential and substrate temperature on the thin film composition was studied. A Cr-Al-C composite target was sputtered utilizing direct current (DCMS: 2.3 W/cm2) and high power pulsed magnetron sputtering (HPPMS: 373 W/cm2) generators. At floating potential, all Cr-Al-C thin films showed similar compositions, independently of the applied target power density. However, as substrate bias potential was increased to â400 V, aluminum deficiencies by a factor of up to 1.6 for DCMS and 4.1 for HPPMS were obtained. Based on the measured ion currents at the substrate, preferential re-sputtering of Al is suggested to cause the dramatic Al depletion. As the substrate temperature was increased to 560 °C, the Al concentration was reduced by a factor of up to 1.9 compared to the room temperature deposition. This additional reduction may be rationalized by thermally induced desorption being active in addition to re-sputtering.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
H. RueÃ, M. to Baben, S. Mráz, L. Shang, P. Polcik, S. Kolozsvári, M. Hans, D. Primetzhofer, J.M. Schneider,