Article ID Journal Published Year Pages File Type
5468227 Vacuum 2017 17 Pages PDF
Abstract
During the pumping process of unbaked all-metal vacuum systems after air exposure, water dominates in a time of ∼105 s (>10−6 Pa). The pumping rates of vacuum systems are difficult to be calculated because of the term of the re-adsorption rates. Under the assumption of quasi-equilibrium state between the adsorption and the gas phases, theoretically, the isotherms of water can be used to solve the pumping equation without the re-adsorption term. Thus, it is important to measure the isotherms of water on technical metal surfaces. In this work, the physisorption isotherm of water on the nickel surface with a wide pressure range (from 1.59 Pa to saturated vapor pressure Ps) is measured using an all-metal apparatus. The results show that the experimental data agree quite well with the empirical isotherm of Redhead within 0.16 ≤ ψ ≤ 0.95 (ψ = P/Ps, P is the pressure; 1.0 ≤ θ ≤ 4.4, and θ is the surface coverage), and the BET isotherm within 0.04 ≤ ψ ≤ 0.40 (0.7 ≤ θ ≤ 1.5). When 1.59 ≤ P ≤ 250 Pa (θ ≤ 0.85), there is a linear relationship between θ and ln(P). This follows the Temkin isotherm, and it confirms the common experimental phenomenon that parts of the outgassing curves of vacuum systems are approximately P = constant × t−1. The results also indicate that some water is weakly trapped in the pores and the grain boundaries of technical metals, and it diffuses and desorbs very slowly.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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