| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5468236 | Vacuum | 2017 | 9 Pages |
Abstract
Current and voltage waveforms of a pulsed discharge have been measured in a wide frequency range (20-300Â kHz) for the two pressure values of 0.1 and 1Â Torr using four different technology-relevant gases: nitrogen, oxygen, carbon tetrafluoride and sulfur hexafluoride. It is shown that the current can be substantially increased in the pulsed dc discharge, especially with electronegative gases, as compared with the discharge current relating to the same but constant voltage. The maximum 9-fold current gain is obtained with sulfur hexafluoride. Carbon tetrafluoride furnishes up to 4-fold amplification, while nitrogen and oxygen show the typical current gain of 1-2. Physical mechanism of this phenomenon is discussed.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
V.A. Lisovskiy, P.A. Ogloblina, S.V. Dudin, V.D. Yegorenkov, A.N. Dakhov,