NEG coating deposition and characterisation of narrow-gap insertion devices and small-diameter chambers for light sources and particle accelerators

The use of NEG coating for narrow-gap insertion devices has steadily grown over the past ten years; a review of both current R&D activities and future perspectives in this field is presented, together with an overview of the analytical techniques employed for the characterisation of the film deposited on small-section chambers. These include SEM morphological inspections, chemical composition analyses and thickness profiling made by EDS and measurements of the getter film's sorption capacity for CO.