Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5468345 | Vacuum | 2017 | 6 Pages |
Abstract
This paper presents a thin nanocrystalline ZnO layer with embedded GaP nanowires (NWs). The NWs were grown in vapour-liquid-solid (VLS) mode by metal organic vapour phase epitaxy (MOVPE) at Au seeds formed from a very thin Au layer. The NWs were finally embedded in ZnO using deposition by RF sputtering combined with etching steps that resulted in a compact antireflection layer. We studied properties of such compact NWs structure by means of x-ray diffraction and atomic force microscopy. The study of mechanical properties was performed by nanoindentation measurements. The nanoindentation measurement showed that the incorporation of GaP nanowires into a ZnO layer led to increased hardness compared with that of a pure ZnO layer. The compact GaP NW/ZnO layer structure also exhibited some degree of pseudoelasticity. In addition, the mechanical properties of the compact nanowire layer are sufficiently robust to allow the thermo-compression bonding on the top of the structure.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Jozef Novák, Agáta LaurenÄÃková, Stanislav Hasenohrl, Ivan Novotný, Jaroslav KováÄ, Marian Valentin, Jaroslav Jr.,