| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5468389 | Vacuum | 2017 | 8 Pages |
Abstract
For all investigated configurations of the magnetrons the minimal working pressure can be reached at a lower level of the geometric unbalance (KGÂ =Â 1.02-1.125) compared to the minimal discharge voltage, and it is independent of the dimensions of magnetron's magnetic system.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Dmitriy A. Golosov,