Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5468453 | Vacuum | 2016 | 4 Pages |
Abstract
Dual magnetron sputtering and thermo plasma nitriding were performed to fabricate Cu-Ti-N coating on the surface of Cu substrate, and the microstructure formation and evolution mechanism were investigated. The results showed that the composition of the Cu-Ti coating could be tuned to be around Cu:Ti = 1:1.2 by the appropriate choice of sputtering power for the dual targets, and only amorphous Cu-Ti phases formed. During the thermo plasma nitriding process, crystalline CuTi and Cu3Ti occurred. Moreover, a nitride layer of about 0.3 μm containing nanocrystalline TiN formed on the surface, and the multi-phase coating developed to be about 4 μm, which could provide better support for the nitrided layer.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Y.D. Zhu, M.F. Yan, Y.X. Zhang, H.T. Chen, Y. Yang,